CAS 511292-99-2 | (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM
Molecular Formula: C13H33N4Ta
Molecular Weight: 426.38
Purity: 97% Min.
Package: 100 g / 1 kg / 25 kg
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Specification of CAS 511292-99-2 | (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM
|
ITEMS |
SPECIFICATION |
|
Fp |
64 °F |
|
color |
yellow |
|
form |
liquid |
|
Sensitive |
air sensitive, moisture sensitive |
|
density |
1.323 g/mL at 21 °C (lit.) |
Related Articles of CAS 511292-99-2 | (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM
Tantalum nitride atomic layer deposition using (tert-butylimido) tris (diethylamido) tantalum and hydrazine
BB Burton, AR Lavoie, SM George - Journal of the …, 2008 - iopscience.iop.org
New surface chemistries for the atomic layer deposition of oxides and nitrides
BB Burton - 2008 - search.proquest.com
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